Optimal design of a flexure hinge-based XYZ atomic force microscopy scanner for minimizing Abbe errors

Dongmin Kim; Dongwoo Kang; Jongyeop Shim; Incheon Song; Daegab Gweon
July 2005
Review of Scientific Instruments;Jul2005, Vol. 76 Issue 7, p073706
Academic Journal
To establish of standard technique of nanolength measurement in a two-dimensional plane, a new (AFM) system has been designed. In this system, measurement uncertainty is dominantly affected by the Abbe error of the XYZ scanning stage. No linear stage is perfectly straight; in other words, every scanning stage is subject to tilting, pitch, and yaw motion. In this article, an AFM system with minimum offset of XYZ sensing is designed. And, the XYZ scanning stage is designed to minimize the rotation angle because Abbe errors occur through the multiply of offset and rotation angle. For XY stage, optimal design is performed to minimize the rotation angle by maximizing the stiffness ratio of motion direction to the parasitic motion direction of each stage. For the Z stage, the optimal design of maximizing the first-resonant frequency is performed. When the resonant frequency increases, the scan speed is improved, thereby reducing errors caused by sensor drift. This article describes the procedures of selecting parameters for the optimal design. The full range of the XYZ scanner is 100 μm×100 μm×10 μm. Based on the solution of the optimization problem, the XYZ scanner is fabricated. And tilting, pitch, and yaw motion are measured by autocollimator to evaluate the performance of XY stage.


Related Articles

  • ECONOMICAL EXPERIMENTATION VIA 'LEAN DESIGN' Goh, T. N. // Quality & Reliability Engineering International;Sep/Oct96, Vol. 12 Issue 5, p383 

    In industrial applications of design of experiments, practical constraints in resources such as budget, time, materials and manpower could lead to difficulties in completing an experiment even of moderate size. This problem can be addressed by an approach referred to as ''lean design', with...

  • Constructing Meta-Models for Computer Experiments. Allen, Theodore T.; Bernshteyn, Mikhail A.; Kabiri-Bamoradian, Khalil // Journal of Quality Technology;Jul2003, Vol. 35 Issue 3, p264 

    Provides comparisons of the accuracy of meta-models derived from computer experiments. Use of alternative approaches to experimentation and analysis; Interaction between relative meta-model accuracy and the choice of experimental design; Design of a plastic seal for an automotive application.

  • A note on the optimal positioning of service units. Carrizosa, E.; Muñoz-Márquez, M.; Puerto, J. // Operations Research;Jan/Feb98, Vol. 46 Issue 1, p155 

    In this paper we address the problem of locating p mobile service units in an n-dimensional space minimizing the expected response time. It is shown that an optimal solution to the problem is a degenerate distribution for the service, concluding that it is optimal to park the p units. This...

  • Regular A-optimal design matrices X = (xij) with xij = -1, 0, 1. Graczyk, Malgorzata // Statistical Papers;Aug2009, Vol. 50 Issue 4, p789 

    New construction methods of the regular A-optimal design matrices with elements -- 1, 0, 1 are presented, under assumption of nonhomogeneity of variance error. The presented constructions are based on the incidence matrices of the balanced bipartite weighing designs.

  • Optimal Test Design for Reliability Demonstration. Gal, Shmuel // Operations Research;Nov/Dec74, Vol. 22 Issue 6, p1236 

    This paper presents the optimal design of tests for demonstrating the reliability of a system, assuming that all the subsystems have a very high reliability so that no failure is expected to occur during the tests.

  • Learn and Earn Through Testing on the Internet. Wyner, Gordon A. // Marketing Research;Fall2000, Vol. 12 Issue 3, p37 

    This article focuses on the opportunities provided by the Internet for market experimentation and optimization. Increasing digitization--the importance of information content over physical matter in business--will make it progressively easier to experimentally alter particular aspects of a...

  • Response Surface Optimization of the Critical Medium Components for Pullulan Production by Aureobasidium pullulans FB-1. Ram Singh; Harpreet Singh; Gaganpreet Saini // Applied Biochemistry & Biotechnology;Jan2009, Vol. 152 Issue 1, p42 

    Abstract  Culture conditions for pullulan production by Aureobasidium pullulans were optimized using response surface methodology at shake flask level without pH control. In the present investigation, a five-level with five-factor central composite rotatable design of experiments was...

  • COMPARISON BETWEEN EFFICIENCY OF RECTANGULAR SEDIMENTATION TANKS USING SINGLE AND SERIES WEIRS IN THEIR INLET ZONE. Mehmanravesh, Samira; Khezri, Seyed Mustafa; Gharehbagh, Vahid Mohammadzadeh // International Journal of Academic Research;Nov2011, Vol. 3 Issue 6, p355 

    Sedimentation tanks are one of the main and costly units of a treatment plant which is responsible to separation of part of suspended particles in water. An optimal design for these tanks improves their performance remarkably. Therefore, any factor influencing their performance worth being...

  • Best Bang for Your Buck-Part 1. ANDERSON-COOK, CHRISTINE M.; LU LU // Quality Progress;Oct2016, Vol. 49 Issue 10, p45 

    The article reports on learning through designed experiments as a sequential process. Topics discussed include design of experiments, strategically planning for the use of resources at different stages of data collection, and maximizing the knowledge gained. Also being discussed are...


Read the Article


Sorry, but this item is not currently available from your library.

Try another library?
Sign out of this library

Other Topics