TITLE

Development of key components and technologies for a high repetition rate and high-power excimer laser

AUTHOR(S)
Goto, Tatsumi; Takagi, Shigeyuki; Kakizaki, Kouji; Saton, Saburoh; Kosugi, Shinichiro; Ohishi, Takashi; Kanazawa, Yukio; Ishii, Akira; Teranishi, Tsuneharu; Yasuoka, Koichi; Shinohe, Takashi; Ohashi, Hiromichi; Endo, Fumihiko; Okamura, Katsuya
PUB. DATE
January 1998
SOURCE
Review of Scientific Instruments;Jan1998, Vol. 69 Issue 1, p1
SOURCE TYPE
Academic Journal
DOC. TYPE
Article
ABSTRACT
Develops the key components and technologies for a xenon chloride excimer laser. Fabrication of a compact axial blower; Creation of x-ray tube for laser preionization.
ACCESSION #
636689

 

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